• DocumentCode
    2652673
  • Title

    Hydride vapour phase epitaxial regrowth of SI-InP: Fe on non-planar surfaces for device fabrication

  • Author

    Lourdudoss, S. ; Kjebon, O.

  • Author_Institution
    Swedish Institute of Microelectronics, Sweden
  • fYear
    1992
  • fDate
    21-24 Apr 1992
  • Firstpage
    131
  • Lastpage
    134
  • Keywords
    Epitaxial growth; Fabrication; Frequency; Indium phosphide; Insulation; Integrated optoelectronics; Iron; Microelectronics; Surface emitting lasers; Wet etching;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semi-Insulating III-V Materials, 1992 Proceedings of the 7th Conference on
  • Print_ISBN
    0-7503-0242-9
  • Type

    conf

  • DOI
    10.1109/SIM.1992.752688
  • Filename
    752688
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2652673