• DocumentCode
    2652683
  • Title

    Test structures and a measurement system for characterising the lifetime of EWOD devices

  • Author

    Gruber, D. ; Li, Y. ; Smith, S. ; Tiwari, A. ; Deng, F. ; Stokes, A.A. ; Terry, J.G. ; Bunting, A.S. ; Mackay, L. ; Langridge-Smith, P. ; Walton, A.J.

  • Author_Institution
    Sch. of Chem., Univ. of Edinburgh, Edinburgh, UK
  • fYear
    2011
  • fDate
    4-7 April 2011
  • Firstpage
    80
  • Lastpage
    84
  • Abstract
    This paper presents a methodology together with a characterisation system for rapidly and quantitatively evaluating the lifetime and reliability of Electro-Wetting-on-Dielectric (EWOD) microfluidic devices. By studying the contact angle (CA) change when electrowetting forces are applied on the test structure, the number of times of a droplet can be switched between relaxed and actuated states can be characterised. This paper describes the development of an automated measurement system together with test structures designed to quickly characterise and optimise EWOD dielectric layer compositions. This enables the rapid determination of the driving voltage that results in the longest lifetime of the device, providing the tools to optimise both the process, architecture and the voltage driving scheme.
  • Keywords
    contact angle; dielectric devices; drops; flow measurement; microfluidics; reliability; wetting; EWOD devices; EWOD dielectric layer compositions; automated measurement system; characterisation system; contact angle; electro-wetting-on-dielectric microfluidic devices; electrowetting forces; test structures; voltage driving scheme; Dielectric measurements; Dielectrics; Electrodes; Optical switches; Temperature measurement; Voltage measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronic Test Structures (ICMTS), 2011 IEEE International Conference on
  • Conference_Location
    Amsterdam
  • ISSN
    1071-9032
  • Print_ISBN
    978-1-4244-8526-0
  • Electronic_ISBN
    1071-9032
  • Type

    conf

  • DOI
    10.1109/ICMTS.2011.5976864
  • Filename
    5976864