DocumentCode
2652683
Title
Test structures and a measurement system for characterising the lifetime of EWOD devices
Author
Gruber, D. ; Li, Y. ; Smith, S. ; Tiwari, A. ; Deng, F. ; Stokes, A.A. ; Terry, J.G. ; Bunting, A.S. ; Mackay, L. ; Langridge-Smith, P. ; Walton, A.J.
Author_Institution
Sch. of Chem., Univ. of Edinburgh, Edinburgh, UK
fYear
2011
fDate
4-7 April 2011
Firstpage
80
Lastpage
84
Abstract
This paper presents a methodology together with a characterisation system for rapidly and quantitatively evaluating the lifetime and reliability of Electro-Wetting-on-Dielectric (EWOD) microfluidic devices. By studying the contact angle (CA) change when electrowetting forces are applied on the test structure, the number of times of a droplet can be switched between relaxed and actuated states can be characterised. This paper describes the development of an automated measurement system together with test structures designed to quickly characterise and optimise EWOD dielectric layer compositions. This enables the rapid determination of the driving voltage that results in the longest lifetime of the device, providing the tools to optimise both the process, architecture and the voltage driving scheme.
Keywords
contact angle; dielectric devices; drops; flow measurement; microfluidics; reliability; wetting; EWOD devices; EWOD dielectric layer compositions; automated measurement system; characterisation system; contact angle; electro-wetting-on-dielectric microfluidic devices; electrowetting forces; test structures; voltage driving scheme; Dielectric measurements; Dielectrics; Electrodes; Optical switches; Temperature measurement; Voltage measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures (ICMTS), 2011 IEEE International Conference on
Conference_Location
Amsterdam
ISSN
1071-9032
Print_ISBN
978-1-4244-8526-0
Electronic_ISBN
1071-9032
Type
conf
DOI
10.1109/ICMTS.2011.5976864
Filename
5976864
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