DocumentCode
2652814
Title
X-ray topography used as a routine tool in the evaluation of the crystal quality of GaAs substrate wafers
Author
Bassignana, I.C. ; Macquistan, D.A.
Author_Institution
Advanced Technology Laboratory, Bell-Northem Research Ltd., Canada
fYear
1992
fDate
21-24 Apr 1992
Firstpage
183
Lastpage
188
Keywords
Biological materials; Crystalline materials; Gallium arsenide; Grain boundaries; Microscopy; Semiconductor materials; Substrates; Surfaces; Voltage; X-ray imaging;
fLanguage
English
Publisher
ieee
Conference_Titel
Semi-Insulating III-V Materials, 1992 Proceedings of the 7th Conference on
Print_ISBN
0-7503-0242-9
Type
conf
DOI
10.1109/SIM.1992.752697
Filename
752697
Link To Document