• DocumentCode
    2652858
  • Title

    Fe doped semi-insulating indium phosphide substrate characterization for device applications

  • Author

    Grattepain, C. ; Huber, A.M.

  • Author_Institution
    THOMSON-CSF LCR, France
  • fYear
    1992
  • fDate
    21-24 Apr 1992
  • Firstpage
    195
  • Lastpage
    199
  • Keywords
    Chemicals; Crystalline materials; Etching; Indium phosphide; Iron; Optical materials; Optical microscopy; Optical surface waves; Optoelectronic devices; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semi-Insulating III-V Materials, 1992 Proceedings of the 7th Conference on
  • Print_ISBN
    0-7503-0242-9
  • Type

    conf

  • DOI
    10.1109/SIM.1992.752699
  • Filename
    752699