DocumentCode
2652858
Title
Fe doped semi-insulating indium phosphide substrate characterization for device applications
Author
Grattepain, C. ; Huber, A.M.
Author_Institution
THOMSON-CSF LCR, France
fYear
1992
fDate
21-24 Apr 1992
Firstpage
195
Lastpage
199
Keywords
Chemicals; Crystalline materials; Etching; Indium phosphide; Iron; Optical materials; Optical microscopy; Optical surface waves; Optoelectronic devices; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Semi-Insulating III-V Materials, 1992 Proceedings of the 7th Conference on
Print_ISBN
0-7503-0242-9
Type
conf
DOI
10.1109/SIM.1992.752699
Filename
752699
Link To Document