DocumentCode
2653631
Title
Flow field plate of micro fuel cell fabrication in UV-nanoimprint lithography
Author
Weihua, Si ; Xiaowen, Dong ; Wenqi, Gu ; Zewen, Liu
Author_Institution
Inst. of Microelectron., Tsinghua Univ., Beijing, China
fYear
2009
fDate
20-23 Oct. 2009
Firstpage
1019
Lastpage
1022
Abstract
A new way is brought forward for the fabrication of the flow field plate of micro fuel cell in UV-nanoimprint lithography. The flow field plate of micro fuel cell is fabricated which structure is gridding. The self-breath micro fuel cell is designed, with which the flow field plate is proved in effect. The cost and processing difficulty of micro fuel cell are reduced.
Keywords
fuel cells; micromechanical devices; nanolithography; soft lithography; ultraviolet lithography; UV-nanoimprint lithography; flow field plate; gridding; micro fuel cell fabrication; Costs; Current density; Etching; Fabrication; Fuel cells; Lithography; Nanolithography; Polymers; Steel; Temperature; Flow field plate; Micro fuel cell; Nanoimprint lithography; UV-nanoimprint lithography;
fLanguage
English
Publisher
ieee
Conference_Titel
ASIC, 2009. ASICON '09. IEEE 8th International Conference on
Conference_Location
Changsha, Hunan
Print_ISBN
978-1-4244-3868-6
Electronic_ISBN
978-1-4244-3870-9
Type
conf
DOI
10.1109/ASICON.2009.5351521
Filename
5351521
Link To Document