DocumentCode
2653939
Title
Digital Etching Of GaAs
Author
Aoyagi, Yoshinobu ; Shinmura, Kouji ; Kawasaki, Kiyoshi ; Gamo, K. ; Namba, Susumu
Author_Institution
Osaka University
fYear
1991
fDate
29 Jul-2 Aug 1991
Firstpage
62
Lastpage
63
Keywords
Atomic beams; Atomic layer deposition; Chemical processes; Controllability; Digital control; Feeds; Gallium arsenide; Sputter etching; Substrates; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN
0-87942-618-7
Type
conf
DOI
10.1109/LEOSST.1991.639020
Filename
639020
Link To Document