PLZT film actuators deposited by a hydrothermal method

Author

Tonokai, Akimasa ; Kanda, Takefumi ; Yamaguchi, Daisuke ; Suzumori, Koichi

Author_Institution

Grad. Sch. of Natural Sci. & Technol., Okayama Univ., Okayama, Japan

fYear

2010

fDate

14-18 Dec. 2010

Firstpage

1584

Lastpage

1589

Abstract

Optical actuators are effective for a miniaturization of micro devices because those actuators can be driven by non-contact energy supply. PLZT is a ferroelectric material which has a photostrictive effect. In this study, a PLZT polycrystalline film has been deposited on a titanium substrate by using a hydrothermal method. The characteristics of the PLZT film have been evaluated. PLZT film actuators have been fabricated by depositing ITO transparent electrode on the surface of the PLZT film. Those actuators have been driven by the ultraviolet light. Performance of the photoresponse drive actuators have been evaluated by measuring displacement, electric current and surface temperature.

Keywords

displacement measurement; electric current measurement; ferroelectric devices; hydrothermal power systems; PLZT film actuators; displacement measurement; electric current measurement; ferroelectric material; hydrothermal method; micro devices; miniaturization; optical actuators; photostrictive effect; surface temperature measurement; titanium substrate; Actuators; Current; Electrodes; Films; Indium tin oxide; Substrates; Temperature measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Robotics and Biomimetics (ROBIO), 2010 IEEE International Conference on

Conference_Location

Tianjin

Print_ISBN

978-1-4244-9319-7

Type

conf

DOI

10.1109/ROBIO.2010.5723566

Filename

5723566