• DocumentCode
    2654785
  • Title

    The Impact Of The Impurity Induced Layer Disordering Process On Optoelectronic Microfabrication

  • Author

    Thornton, Robert L.

  • Author_Institution
    Xerox Palo Alto Research Center, 3333 Coyote Hill Rd., Palo Alto, CA 94304
  • fYear
    1991
  • fDate
    29 Jul-2 Aug 1991
  • Firstpage
    70
  • Lastpage
    70
  • Keywords
    Consumer electronics; Impurities; Laboratories; Laser theory; Optical device fabrication; Optical devices; Optical waveguides; Optoelectronic devices; Physics; Waveguide lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
  • Print_ISBN
    0-87942-618-7
  • Type

    conf

  • DOI
    10.1109/LEOSST.1991.639024
  • Filename
    639024