Experimental quantification of temperature uncertainty for an array of thermally-sensitive MEMS cantilever beams

Presented in this paper is the experimental quantification of the temperature uncertainty in a MEMS thermally-tunable capacitor that is especially suited for harsh-environment applications. The measured temperature uncertainty is less than 0.64degC at each point tested, and less than 3.10% for the entire operating range. This recorded resolution is limited by the capacitance resolution of the employed IC circuit and the stray capacitances of the measurement setup.