Title :
Effects Of Ion Beam Etching On The Magnetic Properties Of Permalloy Thin Films
Author :
Kim, S.D. ; Ryu, H.J. ; Lim, S.H. ; Kim, H.J. ; Lee, J.J.
Author_Institution :
Korea Institute of Science and Technology
Keywords :
Atomic force microscopy; Coercive force; Ion beams; Magnetic films; Magnetic properties; Rough surfaces; Surface morphology; Surface roughness; Transistors; Wet etching;
Conference_Titel :
Magnetics Conference, 1997. Digests of INTERMAG '97., 1997 IEEE International
Conference_Location :
New Orleans, LA, USA
Print_ISBN :
0-7803-3862-6
DOI :
10.1109/INTMAG.1997.597719
