DocumentCode
2656305
Title
The Formation Of Strain-induced Quantum Well Wires By Low Damage Chemical Dry Etching
Author
Tan, I.-H. ; Yasuda, T. ; Mirin, R. ; Lishan, D. ; Jayaraman, V. ; Prater, C. ; Hu, E.L. ; Bowers, J. ; Merz, J.
Author_Institution
University of California, Santa Barbara, CA
fYear
1991
fDate
29 Jul-2 Aug 1991
Firstpage
82
Lastpage
82
Keywords
Chemicals; Dry etching; Gallium arsenide; Human computer interaction; Indium gallium arsenide; Photoluminescence; Wires;
fLanguage
English
Publisher
ieee
Conference_Titel
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN
0-87942-618-7
Type
conf
DOI
10.1109/LEOSST.1991.639031
Filename
639031
Link To Document