DocumentCode
2657397
Title
Predicting the reliability of metal-insulator-metal capacitors (MIMC) in analog devices by modeling
Author
Greenwood, Bruce ; Prasad, Jagdish
Author_Institution
AMI Semicond., Pocatello
fYear
2007
fDate
12-14 Dec. 2007
Firstpage
1
Lastpage
2
Abstract
In this study MIMC reliability has been assessed using Vbd distributions to determine parameters for a ´dielectric thinning´ model. Expected failures over 10- year of life are determined for several products with MIM capacitors. The effectiveness of burn in is evaluated in reducing failures. Design practices to reduce MIMC failures are proposed, such as minimizing application voltage and ensuring stability at V-stress for MIMCs.
Keywords
MIM devices; analogue circuits; reliability; thin film capacitors; MIMC reliability; V-stress; analog devices; dielectric thinning model; failure reduction; metal-insulator-metal capacitors; Analog circuits; Dielectric breakdown; Educational institutions; MIM capacitors; Parasitic capacitance; Predictive models; Silicon compounds; Temperature; USA Councils; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Device Research Symposium, 2007 International
Conference_Location
College Park, MD
Print_ISBN
978-1-4244-1892-3
Electronic_ISBN
978-1-4244-1892-3
Type
conf
DOI
10.1109/ISDRS.2007.4422294
Filename
4422294
Link To Document