Spurious mode suppression via apodization for 1 GHz AlN Contour-Mode Resonators

Author

Giovannini, Marco ; Yazici, Serkan ; Kuo, Nai-Kuei ; Piazza, Gianluca

Author_Institution

Univ. of Pennsylvania, Philadelphia, PA, USA

fYear

2012

fDate

21-24 May 2012

Firstpage

1

Lastpage

5

Abstract

This paper reports, for the first time, on the application of apodization techniques to 1 GHz MEMS AlN Contour-Mode Resonators (CMRs [1]) to efficiently suppress spurious modes in close proximity of the main mechanical resonance. This concept has been applied with excellent results to a variety of one port resonators formed by patterned top electrodes made out of Aluminum, and a floating bottom electrode made out of Platinum sandwiching the AlN film. As also predicted by 3D COMSOL simulations, a complete elimination of spurious responses in the admittance plot of these resonators is attained without impacting their quality factor and electromechanical coupling coefficient.

Keywords

Q-factor; aluminium; aluminium compounds; micromechanical resonators; 3D COMSOL simulations; AlN; MEMS contour-mode resonator; admittance plot; aluminum; apodization technique; electromechanical coupling coefficient; floating bottom electrode; frequency 1 GHz; mechanical resonance; one-port resonator; quality factor; spurious mode suppression; spurious response elimination; top electrode pattern; Electrodes; Fingers; Micromechanical devices; Piezoelectric transducers; Shape; Standards; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium (FCS), 2012 IEEE International

Conference_Location

Baltimore, MD

ISSN

1075-6787

Print_ISBN

978-1-4577-1821-2

Type

conf

DOI

10.1109/FCS.2012.6243626

Filename

6243626