• DocumentCode
    2658192
  • Title

    Vertical integration using transfer printing

  • Author

    Tunnell, A.J. ; Ballarotto, V.W. ; Hines, D.R. ; Williams, E.D.

  • Author_Institution
    Univ. of Maryland, College Park
  • fYear
    2007
  • fDate
    12-14 Dec. 2007
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Transfer printing can be used to fabricate individual thin-film transistors on flexible substrates using a variety of non-traditional semiconductors. However, practical implementation of transfer printing for large scale or hybrid circuits requires a mechanism to connect individual elements vertically through the dielectric layer. We have developed a process for fabricating vias with transfer printing by sequentially printing two separate sub-assemblies.
  • Keywords
    CMOS integrated circuits; printing; thin film transistors; flexible substrates; hybrid circuits; large scale circuits; thin-film transistors; transfer printing; vertical integration; CMOS technology; Educational institutions; Electrodes; Gold; Inductors; Integrated circuit interconnections; Laboratories; Positron emission tomography; Printing; Spirals;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Device Research Symposium, 2007 International
  • Conference_Location
    College Park, MD
  • Print_ISBN
    978-1-4244-1892-3
  • Electronic_ISBN
    978-1-4244-1892-3
  • Type

    conf

  • DOI
    10.1109/ISDRS.2007.4422336
  • Filename
    4422336