• DocumentCode
    2658539
  • Title

    Spatially resolving the degradation of SPC thin-film transistors under AC stress

  • Author

    Chang, Kai-Hsiang ; Lee, Ming-Hsien ; Lin, Horng-Chih ; Huang, Tiao-Yuan ; Lee, Yao-Jen

  • Author_Institution
    Nat. Chiao Tung Univ., Hsinchu
  • fYear
    2007
  • fDate
    12-14 Dec. 2007
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    In this work, a new test structure was employed in the analysis of hot-carrier degradation under AC operations. We find that the on-current degrades with reducing falling time and confirm that the damage region is located near the drain. The experiment shows such tester has a high sensitivity in detecting AC degradation and provides unambiguous evidence that the damageoccurs during transient stages. With these unique features, the proposed test structure represents a powerful tool in practical applications for studying the reliability of TFT devices.
  • Keywords
    hot carriers; thin film transistors; SPC thin-film transistor degradation; TFT devices; hot-carrier degradation analysis; test structure; Degradation; Electric fields; Electrons; Frequency; Hot carriers; Spatial resolution; Stress; Testing; Thin film transistors; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Device Research Symposium, 2007 International
  • Conference_Location
    College Park, MD
  • Print_ISBN
    978-1-4244-1892-3
  • Electronic_ISBN
    978-1-4244-1892-3
  • Type

    conf

  • DOI
    10.1109/ISDRS.2007.4422354
  • Filename
    4422354