DocumentCode
2658539
Title
Spatially resolving the degradation of SPC thin-film transistors under AC stress
Author
Chang, Kai-Hsiang ; Lee, Ming-Hsien ; Lin, Horng-Chih ; Huang, Tiao-Yuan ; Lee, Yao-Jen
Author_Institution
Nat. Chiao Tung Univ., Hsinchu
fYear
2007
fDate
12-14 Dec. 2007
Firstpage
1
Lastpage
2
Abstract
In this work, a new test structure was employed in the analysis of hot-carrier degradation under AC operations. We find that the on-current degrades with reducing falling time and confirm that the damage region is located near the drain. The experiment shows such tester has a high sensitivity in detecting AC degradation and provides unambiguous evidence that the damageoccurs during transient stages. With these unique features, the proposed test structure represents a powerful tool in practical applications for studying the reliability of TFT devices.
Keywords
hot carriers; thin film transistors; SPC thin-film transistor degradation; TFT devices; hot-carrier degradation analysis; test structure; Degradation; Electric fields; Electrons; Frequency; Hot carriers; Spatial resolution; Stress; Testing; Thin film transistors; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Device Research Symposium, 2007 International
Conference_Location
College Park, MD
Print_ISBN
978-1-4244-1892-3
Electronic_ISBN
978-1-4244-1892-3
Type
conf
DOI
10.1109/ISDRS.2007.4422354
Filename
4422354
Link To Document