Electrical sorting of carbon nanotube transistors for mass-producible bio-sensors

This paper reports useful fabrication scheme customized for biosensing application by adopting the Collins approach of electrical breakdown (Collins, 2001) with some modification to improve the fabrication cost and reduce fabrication time.The electrical breakdown scheme was modified to increase the yield of electrical sorting and reduce sorting time, which is very important in real mass-production. CNTFETs were fabricated using the patterned catalyst growth technique, and source and drain electrodes were defined using photolithography and lift-off process. Then electrical sorting was performed in ambient condition.