Miniature BAW resonators and filters based on single crystals of strong piezoelectrics

Author

Gruzinenco, V.B. ; Medvedev, A.V. ; Matsak, A.N. ; Buzanov, O.A.

fYear

2003

fDate

4-8 May 2003

Firstpage

654

Lastpage

656

Abstract

Using single crystals of "strong" piezoelectrics allows sizable reduction of BAW-resonators and filters. This paper reviews new information about development of microminiature BAW-resonators and monolithic filters fabricated from a single piece of quartz, LGS, LGT and lithium tantalate. The investigation results of wideband high-frequency (40-100 MHz) monolithic crystals filters using inverted mesa-technology are given. It is shown that these miniature resonators have considerable smaller values of aging, motional resistance and capacitance ratio in comparison with these parameters of quartz crystal units. The possibility of application of microminiature resonators (volume less than 0.02 cm³) of different new types TCXO\´s, VCXO\´s, wide-band filters and other devices is proved.

Keywords

ageing; bulk acoustic wave devices; capacitance; crystal filters; crystal resonators; gadolinium compounds; lanthanum compounds; lithium compounds; piezoresistance; quartz; 40 to 100 MHz; BAW filters; BAW resonator; LGS; La₃Ga₅SiO₁₄; SiO₂; aging; capacitance ratio; mesa technology; microminiature resonators; monital resistance; monolithic filters; piezoelectric single crystals; quartz; temperature compensated crystal oscillator; voltage controlled crystal oscillator; wide band filters; wide band gap high frequency monolithic crystals filters; Capacitance; Crystallography; Crystals; Frequency; Lithium compounds; Piezoelectric devices; Production; Resonator filters; Stability; Wideband;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 2003. Proceedings of the 2003 IEEE International

ISSN

1075-6787

Print_ISBN

0-7803-7688-9

Type

conf

DOI

10.1109/FREQ.2003.1275169

Filename

1275169