• DocumentCode
    2659411
  • Title

    X-ray angle sorting of small-size quartz blanks using the Ω-Scan-state and perspective

  • Author

    Berger, H. ; Bradaczek, H.-A. ; Bradaczek, H. ; Hildebrandt, G.

  • Author_Institution
    EFG Int. Res. Center, Berlin, Germany
  • fYear
    2003
  • fDate
    4-8 May 2003
  • Firstpage
    761
  • Lastpage
    764
  • Abstract
    Recently developed angle-sorting machines for AT-cut quartz based on the Ω-Scan method allow the measurement of small blanks down to about 1 mm2, the position-dependent measurement of wafers, as well as the determination of absolute cutting angles. The twin apparatus ("The Carousel") reduces the cycling time nearly to one third. Distributions of cutting-angles measured on wafers and blanks show that there can exist appreciable changes, which may have consequences referring to the active oscillator area. Therefore, the use of polycapillary optics is discussed to adapt the irradiated area to the active one as well as to avoid systematic errors measuring still smaller blanks. Very probably, these optics would also lead to significantly smaller statistic errors and/or shorter cycling times.
  • Keywords
    X-ray optics; angular measurement; measurement errors; optical collimators; quartz; Ω-scan method; SiO2; X-ray angle sorting; active oscillator area; cutting angles; cycling time; irradiated area; polycapillary optics; position dependent wafer measurement; small size quartz blanks; statistic errors; systematic errors; Area measurement; Charge measurement; Current measurement; Error analysis; Goniometers; Oscillators; Position measurement; Size measurement; Sorting; X-ray lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control Symposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 2003. Proceedings of the 2003 IEEE International
  • ISSN
    1075-6787
  • Print_ISBN
    0-7803-7688-9
  • Type

    conf

  • DOI
    10.1109/FREQ.2003.1275189
  • Filename
    1275189