DocumentCode
2659411
Title
X-ray angle sorting of small-size quartz blanks using the Ω-Scan-state and perspective
Author
Berger, H. ; Bradaczek, H.-A. ; Bradaczek, H. ; Hildebrandt, G.
Author_Institution
EFG Int. Res. Center, Berlin, Germany
fYear
2003
fDate
4-8 May 2003
Firstpage
761
Lastpage
764
Abstract
Recently developed angle-sorting machines for AT-cut quartz based on the Ω-Scan method allow the measurement of small blanks down to about 1 mm2, the position-dependent measurement of wafers, as well as the determination of absolute cutting angles. The twin apparatus ("The Carousel") reduces the cycling time nearly to one third. Distributions of cutting-angles measured on wafers and blanks show that there can exist appreciable changes, which may have consequences referring to the active oscillator area. Therefore, the use of polycapillary optics is discussed to adapt the irradiated area to the active one as well as to avoid systematic errors measuring still smaller blanks. Very probably, these optics would also lead to significantly smaller statistic errors and/or shorter cycling times.
Keywords
X-ray optics; angular measurement; measurement errors; optical collimators; quartz; Ω-scan method; SiO2; X-ray angle sorting; active oscillator area; cutting angles; cycling time; irradiated area; polycapillary optics; position dependent wafer measurement; small size quartz blanks; statistic errors; systematic errors; Area measurement; Charge measurement; Current measurement; Error analysis; Goniometers; Oscillators; Position measurement; Size measurement; Sorting; X-ray lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 2003. Proceedings of the 2003 IEEE International
ISSN
1075-6787
Print_ISBN
0-7803-7688-9
Type
conf
DOI
10.1109/FREQ.2003.1275189
Filename
1275189
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