Title :
Electrical characterization of Pd-PdO nanocomposites and PdO thin films prepared by thermal oxidation of Pd
Author :
García-Serrano, O. ; Peña-Sierra, R. ; Romero-Paredes, G.
Author_Institution :
Dept. of Electr. Eng., CINVESTAV, Mexico City, Mexico
Abstract :
Electrical characterization of nanometric PdO films produced by thermal oxidation of Pd films in air at atmospheric pressure is reported. The PdO films were characterized using the van der Pauw-Hall method to establish the effects of oxidation degree of Pd thin films. The measured carrier mobility is directly related to the oxidation rate and film thickness. The produced films are n-type with carrier concentration of 1017 to 1020 cm-3 and electron mobility of 22-38 and 20-28 cm2/Vs for complete and partially oxidized films, respectively. XRD studies were used as a tool to determine the complete oxidation of the Pd film considering the volume change in the unit cells of Pd and PdO.
Keywords :
X-ray diffraction; carrier density; electron mobility; nanocomposites; nanofabrication; nanostructured materials; oxidation; palladium; palladium compounds; thin films; Pd-PdO; PdO; XRD; atmospheric pressure; carrier concentration; carrier mobility; electrical property; electron mobility; nanocomposites; nanometric films; thermal oxidation; thin films; van der Pauw-Hall method; Conductivity; Electrical engineering; Films; Oxidation; Temperature measurement; X-ray scattering; Composite electrical properties; Hall measurements; Nanometric Films; Pd; PdO; Sputtering; partially oxidized films;
Conference_Titel :
Electrical Engineering Computing Science and Automatic Control (CCE), 2010 7th International Conference on
Conference_Location :
Tuxtla Gutierrez
Print_ISBN :
978-1-4244-7312-0
DOI :
10.1109/ICEEE.2010.5608620
