Title :
Modeling temperature sensitivity of STW using Lagrangian material constants
Author :
Dulmet, B. ; Bourquin, R.
Author_Institution :
Ecole Nat. Superieure de Mecanique et des Microtech., Besancon, France
Abstract :
This paper details the computation of the speed of surface transverse waves on periodically corrugated surfaces with help of the effective lagrangian material constants referred to the natural state of the crystal. The main benefit of the method is that, at the difference of commonly encountered methods based on the perturbation theory, it allows in a single pass for a direct computation of the temperature sensitivity of the speed or of the delay up to the third order in terms of temperature, thereby giving access to the modeling of the location of turn over points in temperature-compensated cuts.
Keywords :
surface acoustic wave resonators; SiO2; lagrangian material constants; perturbation theory; surface transverse wave; temperature sensitivity; Boundary conditions; Corrugated surfaces; Dielectric constant; Dielectric materials; Geometry; Lagrangian functions; Resonance; Temperature sensors; Thermal expansion; Thermal stresses;
Conference_Titel :
Frequency Control Symposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 2003. Proceedings of the 2003 IEEE International
Print_ISBN :
0-7803-7688-9
DOI :
10.1109/FREQ.2003.1275205