• DocumentCode
    2660131
  • Title

    A 100 MHz MEMS SiBAR phase modulator for quadrature phase shift keying

  • Author

    Sorenson, Logan ; Ayazi, Farrokh

  • Author_Institution
    Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
  • fYear
    2012
  • fDate
    21-24 May 2012
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    A technique is proposed to employ the phase shifting capability of a MEMS resonator to form the basic component of a switchless quadrature phase shift keying (QPSK) scheme. The advantages of such an approach include direct baseband to RF modulation, no generation of intermodulation products since the resonator is operated linearly, and small size, cost, and power dissipation. An example phase modulator system built using a 100 MHz SiBAR demonstrates at least 54° of relative phase shift.
  • Keywords
    bulk acoustic wave devices; elemental semiconductors; micromechanical resonators; modulators; quadrature phase shift keying; silicon; MEMS SiBAR phase modulator; MEMS resonator; RF modulation; Si; frequency 100 MHz; intermodulation products; phase shifting capability; quadrature phase shift keying; silicon bulk acoustic resonator; switchless QPSK scheme; Micromechanical devices; Oscillators; Phase shift keying; Radio frequency; Resonant frequency; Tuning;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control Symposium (FCS), 2012 IEEE International
  • Conference_Location
    Baltimore, MD
  • ISSN
    1075-6787
  • Print_ISBN
    978-1-4577-1821-2
  • Type

    conf

  • DOI
    10.1109/FCS.2012.6243734
  • Filename
    6243734