Carbon nanofiber switches and sensors

Author

Kaul, Anupama B.

Author_Institution

Jet Propulsion Lab., California Inst. of Technol., Pasadena, CA, USA

fYear

2012

fDate

21-24 May 2012

Firstpage

1

Lastpage

4

Abstract

In this paper, we describe the implementation of carbon nanofibers (CNFs) for nano-electro-mechanical-systems (NEMS), which have potential applications in switches and resonant sensors. The CNFs, synthesized using plasma enhanced chemical vapor deposition (PECVD), are vertically oriented which can enable the formation of 3D NEMS structures for enhanced integration densities compared to 2D planar NEMS. We describe the material and device characterization results of these vertically oriented CNFs. Mechanical testing on individual CNFs shows that these structures are extremely elastic and well-adhered to the substrate, making them very attractive for enabling robust 3D NEMS architectures.

Keywords

carbon; chemical sensors; mechanical testing; microswitches; nanofibres; nanosensors; plasma CVD; 2D planar NEMS; C; PECVD; carbon nanofiber sensors; carbon nanofiber switches; mechanical testing; nanoelectromechanical-systems; plasma enhanced chemical vapor deposition; robust 3D NEMS architectures; vertically oriented CNF; Nanoelectromechanical systems; Nickel; Sensors; Silicon; Substrates; Switches;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium (FCS), 2012 IEEE International

Conference_Location

Baltimore, MD

ISSN

1075-6787

Print_ISBN

978-1-4577-1821-2

Type

conf

DOI

10.1109/FCS.2012.6243747

Filename

6243747