DocumentCode
2661355
Title
The Impact of the Rare-earth Precursor on the Composition, Structure and Luminescence of Er-doped Silicon-rich Silicon Oxide Films
Author
Flynn, M. ; Zalloum, O.H.Y. ; Wojcik, J. ; Calder, I. ; Gujrathi, S. ; Hill, S. ; Mascher, P.
Author_Institution
Dept. of Eng. Phys., McMaster Univ., Hamilton, Ont.
fYear
2006
fDate
13-15 Sept. 2006
Firstpage
46
Lastpage
48
Abstract
Silicon-rich silicon oxide films have been doped using an organometallic erbium precursor. Carbon contamination in the films is shown to have a pronounced effect on the visible photoluminescence. The doping also impacts formation of nanocrystals within the films
Keywords
erbium; nanostructured materials; photoluminescence; plasma CVD; silicon compounds; thin films; ECR-PECVD; Er-doped silicon-rich silicon oxide films; SiO:Er; carbon contamination; electron cyclotron resonance plasma enhanced chemical vapour deposition; nanocrystals; organometallic erbium precursor; rare-earth precursor impact; visible photoluminescence; Carbon dioxide; Doping; Electrons; Erbium; Luminescence; Photoluminescence; Plasma temperature; Semiconductor films; Silicon; Sputtering;
fLanguage
English
Publisher
ieee
Conference_Titel
Group IV Photonics, 2006. 3rd IEEE International Conference on
Conference_Location
Ottawa, Ont.
Print_ISBN
1-4244-0096-1
Type
conf
DOI
10.1109/GROUP4.2006.1708160
Filename
1708160
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