DocumentCode
2661387
Title
Experimental Investigations Of The Production High Density Working Fluid Using A Coaxial Discharge
Author
Lehr, Marcel ; Carswell, Leo ; Alaniz, A. ; Degnan, J. ; Englert, S. ; Englert, T. ; Holmes, Justin ; Kiuttu, G. ; Graham, James
Author_Institution
Phillips Laboratory
fYear
1993
fDate
1-3 June 1993
Firstpage
151
Lastpage
151
Keywords
Coaxial components; Plasma applications; Plasma density; Plasma materials processing; Plasma properties; Plasma sheaths; Plasma sources; Plasma waves; Production; Radio frequency;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location
Tampa, FL, USA
Print_ISBN
0-7803-0716-X
Type
conf
DOI
10.1109/PLASMA.1992.697933
Filename
697933
Link To Document