Title :
Ion kinetics in a low pressure RF Sheath
Author :
Skorik, M.A. ; Allen, Jonathan E.
Author_Institution :
Oxford OKI
Keywords :
Anodes; Distribution functions; Electrons; Equations; Kinetic theory; Plasma measurements; Plasma sources; Plasma temperature; Radio frequency; Wire;
Conference_Titel :
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location :
Tampa, FL, USA
Print_ISBN :
0-7803-0716-X
DOI :
10.1109/PLASMA.1992.697935
