DocumentCode
2662021
Title
Disk Topography Metrology for Addressing Head-Disk Interface Challenges
Author
Tribhuvan, P. ; Velidandla, V. ; Venkataram, S.
Author_Institution
Growth&Emerging Markets Div., KLA-Tencor, San Jose, CA
fYear
2006
fDate
Nov. 29 2006-Dec. 1 2006
Firstpage
1
Lastpage
2
Abstract
A new technology for topography metrology of bare glass, metal substrate and finished media is presented. The capabilities of this technology relative to other methods and how it addresses requirements for advanced head-disk interface (HDI) challenges is discussed
Keywords
optical disc storage; optical glass; surface topography measurement; bare glass; disk topography metrology; head-disk interface; metal substrate; spatial bandwidth; Atomic force microscopy; Glass; Laser stability; Metrology; Optical noise; Optical scattering; Optical sensors; Radar measurements; Surface topography; Testing; Defects; flying-height; spatial bandwidth; topography;
fLanguage
English
Publisher
ieee
Conference_Titel
Asia-Pacific Magnetic Recording Conference, 2006
Conference_Location
Singapore
Print_ISBN
1-4244-0863-6
Type
conf
DOI
10.1109/APMRC.2006.365952
Filename
4215337
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