Title :
Disk Topography Metrology for Addressing Head-Disk Interface Challenges
Author :
Tribhuvan, P. ; Velidandla, V. ; Venkataram, S.
Author_Institution :
Growth&Emerging Markets Div., KLA-Tencor, San Jose, CA
fDate :
Nov. 29 2006-Dec. 1 2006
Abstract :
A new technology for topography metrology of bare glass, metal substrate and finished media is presented. The capabilities of this technology relative to other methods and how it addresses requirements for advanced head-disk interface (HDI) challenges is discussed
Keywords :
optical disc storage; optical glass; surface topography measurement; bare glass; disk topography metrology; head-disk interface; metal substrate; spatial bandwidth; Atomic force microscopy; Glass; Laser stability; Metrology; Optical noise; Optical scattering; Optical sensors; Radar measurements; Surface topography; Testing; Defects; flying-height; spatial bandwidth; topography;
Conference_Titel :
Asia-Pacific Magnetic Recording Conference, 2006
Conference_Location :
Singapore
Print_ISBN :
1-4244-0863-6
DOI :
10.1109/APMRC.2006.365952
