• DocumentCode
    2662423
  • Title

    A novel optimization procedure for designing of high-sensitivity piezoresistive accelerometers utilizing MNA method

  • Author

    Tran, Tan D. ; Bui, Tung T. ; Nguyen, Thuy P.

  • Author_Institution
    MEMS & Microsyst. Dept., VNUH, Hanoi, Vietnam
  • fYear
    2009
  • fDate
    9-11 Nov. 2009
  • Firstpage
    44
  • Lastpage
    47
  • Abstract
    This paper presents the novel optimization procedure for designing of high-sensitivity piezoresistive accelerometers using a MNA tool called SUGAR. The purpose of this novel method is to achieve the high sensitivity device. The dimension of sensor is as small as 1.5 mm2, so it is suitable for many specific applications.
  • Keywords
    accelerometers; microsensors; piezoresistive devices; MEMS technology; high sensitivity device; high-sensitivity piezoresistive accelerometers; sensor dimension; Accelerometers; Design optimization; Piezoresistance;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro-NanoMechatronics and Human Science, 2009. MHS 2009. International Symposium on
  • Conference_Location
    Nagoya
  • Print_ISBN
    978-1-4244-5094-7
  • Electronic_ISBN
    978-1-4244-5095-4
  • Type

    conf

  • DOI
    10.1109/MHS.2009.5352097
  • Filename
    5352097
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2662423