DocumentCode
2662703
Title
Tunable Infrared Sensors - Integration of MEMS with Semiconductor Detectors
Author
Dell, John M. ; Musca, Charles A. ; Antoszewski, Jarek ; Faraone, L.
Author_Institution
Microelectron. Res. Group, Western Australia Univ., Crawley, WA
fYear
2006
fDate
21-24 Aug. 2006
Firstpage
5
Lastpage
6
Abstract
Tunable infrared sensors fabricated by surface micromachining with a maximum thermal budget of 2 hours at 125degC have been realized, demonstrating that a generic, robust, environmentally stable MEMS process is possible using maximum process temperatures <200degC
Keywords
infrared detectors; micromachining; micromechanical devices; optical sensors; optical tuning; semiconductor devices; 125 degC; 2 hours; MEMS; microelectromechanical device; semiconductor detector; surface micromachining; tunable detectors; tunable infrared sensor; Fabry-Perot; Filters; Hyperspectral imaging; Infrared detectors; Infrared sensors; Micromachining; Micromechanical devices; Mirrors; Optical surface waves; Sensor arrays;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location
Big Sky, MT
Print_ISBN
0-7803-9562-X
Type
conf
DOI
10.1109/OMEMS.2006.1708237
Filename
1708237
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