Title :
MEMS Tunable VCSEL with Concave Mirror using the Selective Polishing Method
Author :
Kanbara, Nobuhiko ; Tezuka, Shin-ichirou ; Watanabe, Tetsuya
Author_Institution :
Yokogawa Electr. Corp., Nagano
Abstract :
We have proposed a micromachined tunable vertical cavity surface emitting laser fabricated using the selective polishing method and two chip bonding. The MEMS-VCSEL consists of a micromachined SOI substrate with concave figure and a half VCSEL chip. The MEMS chip and the half VCSEL chip are bonded together with a narrow gap between them using the metal thermo compression bonding method. Wavelength tuning is achieved electrostatically by applying voltage between silicon membrane and silicon substrate. We have obtained wide tuning range without a mode-hop and sidemode suppression are about 32 nm and 40 dB respectively
Keywords :
laser cavity resonators; laser mirrors; laser tuning; micro-optomechanical devices; micromachining; optical fabrication; polishing; silicon-on-insulator; surface emitting lasers; MEMS tunable VCSEL; Si-SiO2; chip bonding; concave mirror; metal thermo compression bonding method; micromachined SOI substrate; micromachined tunable vertical cavity surface emitting laser; selective polishing method; silicon membrane; silicon substrate; wavelength tuning; Biomembranes; Bonding; Laser tuning; Micromechanical devices; Mirrors; Silicon; Surface emitting lasers; Tunable circuits and devices; Vertical cavity surface emitting lasers; Voltage;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708239
