DocumentCode

2662751

Title

Thin Film Transfer Process for Low Cost Mcm-D Fabrication

Author

Narayan, C. ; Purushothaman, S. ; Doany, F. ; Deutsch, A.

Author_Institution

T.J. Watson Research Center, NY

fYear

1994

fDate

13-15 Apr 1994

Firstpage

105

Lastpage

114

Keywords

Costs; Fabrication; Flexible manufacturing systems; Glass; Packaging; Polymer films; Pulp manufacturing; Substrates; Transistors; Wiring;

fLanguage

English

Publisher

ieee

Conference_Titel

Multichip Modules, 1994. Proceedings of the 1994 International Conference on

Print_ISBN

0-930815-39-4

Type

conf

DOI

10.1109/ICMCM.1994.753537

Filename

753537