DocumentCode
2662805
Title
Monolithic Integration of Piezoelectric Cantilever in Tunable VCSEL
Author
Cheng, Kan Bun ; Huang, Michael C Y ; Zhou, Ye ; Alvaro, San Paulo ; Chang-Hasnain, Connie J. ; Pisano, Albert P.
Author_Institution
Dept. of Mech. Eng., California Univ., Berkeley, CA
fYear
2006
fDate
21-24 Aug. 2006
Firstpage
11
Lastpage
12
Abstract
We have designed, fabricated and characterized the monolithic integrated piezoelectric actuated cantilever beam in tunable short-wavelength VCSEL. Single mode emission with continuously tuning range of 3 nm and low power consumption was experimentally obtained
Keywords
cantilevers; laser cavity resonators; laser tuning; monolithic integrated circuits; optical design techniques; optical fabrication; piezoelectric actuators; surface emitting lasers; 3 nm; monolithic integration; piezoelectric actuated cantilever beam; single mode emission; tunable short-wavelength VCSEL; Distributed Bragg reflectors; Laser tuning; Micromechanical devices; Monolithic integrated circuits; Piezoelectric devices; Piezoelectric effect; Structural beams; Tunable circuits and devices; Vertical cavity surface emitting lasers; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location
Big Sky, MT
Print_ISBN
0-7803-9562-X
Type
conf
DOI
10.1109/OMEMS.2006.1708240
Filename
1708240
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