Title :
Monolithic Integration of Piezoelectric Cantilever in Tunable VCSEL
Author :
Cheng, Kan Bun ; Huang, Michael C Y ; Zhou, Ye ; Alvaro, San Paulo ; Chang-Hasnain, Connie J. ; Pisano, Albert P.
Author_Institution :
Dept. of Mech. Eng., California Univ., Berkeley, CA
Abstract :
We have designed, fabricated and characterized the monolithic integrated piezoelectric actuated cantilever beam in tunable short-wavelength VCSEL. Single mode emission with continuously tuning range of 3 nm and low power consumption was experimentally obtained
Keywords :
cantilevers; laser cavity resonators; laser tuning; monolithic integrated circuits; optical design techniques; optical fabrication; piezoelectric actuators; surface emitting lasers; 3 nm; monolithic integration; piezoelectric actuated cantilever beam; single mode emission; tunable short-wavelength VCSEL; Distributed Bragg reflectors; Laser tuning; Micromechanical devices; Monolithic integrated circuits; Piezoelectric devices; Piezoelectric effect; Structural beams; Tunable circuits and devices; Vertical cavity surface emitting lasers; Voltage;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708240
