DocumentCode
2662810
Title
Mcm Substrate with High Capacitance
Author
Kambe, Rokuro ; Imai, Ryuji ; Takada, Toshikatsu ; Arakawa, Michiya ; Kuroda, Masao
Author_Institution
NTK Technical Ceramics Div., NGK Spark Plug Go., Ltd., Japan
fYear
1994
fDate
13-15 Apr 1994
Firstpage
136
Lastpage
141
Keywords
Capacitance; Capacitors; Ceramics; Dielectric materials; Dielectric substrates; Dielectric thin films; Electrodes; Rough surfaces; Sputtering; Surface roughness;
fLanguage
English
Publisher
ieee
Conference_Titel
Multichip Modules, 1994. Proceedings of the 1994 International Conference on
Print_ISBN
0-930815-39-4
Type
conf
DOI
10.1109/ICMCM.1994.753542
Filename
753542
Link To Document