• DocumentCode
    2662842
  • Title

    Silicon Microtoroidal Resonators with Integrated MEMS Tunable Optical Coupler

  • Author

    Yao, Jin ; Leuenberger, David ; Lee, Ming-Chang M. ; Wu, Ming C.

  • Author_Institution
    Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA
  • fYear
    2006
  • fDate
    21-24 Aug. 2006
  • Firstpage
    17
  • Lastpage
    18
  • Abstract
    A single crystalline silicon microtoroidal resonator with integrated MEMS tunable optical coupler is demonstrated for the first time. The coupling coefficient is continuously tuned from almost zero up to 13.3%
  • Keywords
    elemental semiconductors; integrated optics; micro-optomechanical devices; micromechanical resonators; optical couplers; optical resonators; optical tuning; silicon; coupling coefficient; crystalline silicon microtoroidal resonators; integrated MEMS tunable optical coupler; Fiber nonlinear optics; Integrated optics; Micromechanical devices; Optical coupling; Optical filters; Optical resonators; Optical sensors; Optical waveguides; Silicon; Tunable circuits and devices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
  • Conference_Location
    Big Sky, MT
  • Print_ISBN
    0-7803-9562-X
  • Type

    conf

  • DOI
    10.1109/OMEMS.2006.1708243
  • Filename
    1708243
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2662842