DocumentCode
2662955
Title
Mass-Producible Nano and Microphotonic Devices and Systems
Author
Stuck, A. ; Schnieper, M. ; Obi, S.
Author_Institution
Centre Suisse d´´Electronique et de Microtechnique SA, Zurich
fYear
2006
fDate
21-24 Aug. 2006
Firstpage
32
Lastpage
33
Abstract
Color filters, antireflex gratings, grating polarizers, microlenses and mechanical holding structures can be manufactured with the same UV-embossing process and integrated into complex optical mircrosystems. It makes cost-effective wafer-scale manufacturing of optical microsystems a reality
Keywords
diffraction gratings; embossing; integrated optics; micro-optomechanical devices; microlenses; moulding; optical fabrication; optical filters; optical polarisers; replica techniques; UV-embossing replica process; antireflex gratings; color filters; grating polarizers; integrated microoptic devices; mass production; mechanical holding structures; microlenses; optical microsystems; wafer-scale manufacturing; Dielectrics; Gratings; Lenses; Lighting; Manufacturing; Microoptics; Optical filters; Optical sensors; Polarization; Semiconductor device manufacture;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location
Big Sky, MT
Print_ISBN
0-7803-9562-X
Type
conf
DOI
10.1109/OMEMS.2006.1708250
Filename
1708250
Link To Document