Title :
Fully-Functional Tip-Tilt-Piston Micromirror Array
Author :
Milanovic, Veljko ; Castelino, Kenneth ; McCormick, Daniel
Author_Institution :
Adriatic Res. Inst., Berkeley, CA
Abstract :
A fully-functional 2times2-element array of tip-tilt-piston micromirrors with large deflection angles and large piston range is presented. The fabrication of micromirrors with different technique is described
Keywords :
micro-optomechanical devices; micromirrors; optical arrays; optical fabrication; deflection angles; micromirror fabrication; piston range; tip-tilt-piston micromirror array; Actuators; Bonding; Calibration; Control systems; Couplings; Micromirrors; Mirrors; Pistons; Silicon; Voltage control;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708253
