DocumentCode
2663047
Title
Compact and Stress-Released Piston Tip-Tilt Mirror
Author
Noell, W. ; Hugi, A. ; Overstolz, T. ; Waldis, S. ; Stanley, R. ; de Rooij, N.F.
Author_Institution
Inst. of Microtechnol., Neuchatel Univ.
fYear
2006
fDate
21-24 Aug. 2006
Firstpage
40
Lastpage
41
Abstract
A compact stress-compensating micromirror design was fabricated and characterized that provides optically flat surfaces and large 3D displacement. Suitable applications are tunable optical-cavity devices (lasers, filters, etc.), beam steerers and scanners, and deformable mirrors
Keywords
adaptive optics; beam steering; compensation; interference filters; laser cavity resonators; micro-optomechanical devices; micromirrors; optical design techniques; optical fabrication; optical scanners; 3D displacement; MEMS; beam steerers; compact stress-compensation; deformable mirrors; interference filters; micromirror design; mirror fabrication; optical flat surfaces; scanners; stress-released piston tip-tilt mirror; tunable lasers; tunable optical-cavity devices; Adaptive optics; Laser beams; Micromirrors; Mirrors; Optical devices; Optical filters; Optical interferometry; Pistons; Residual stresses; Tunable circuits and devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location
Big Sky, MT
Print_ISBN
0-7803-9562-X
Type
conf
DOI
10.1109/OMEMS.2006.1708254
Filename
1708254
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