Uses of polyimide for micromachining applications

In this paper, applications of polyimide materials to micromachining technology is reviewed. First, the use of both photosensitive and nonphotosensitive polyimides as electroplating molds for the fabrication of thick and high aspect ratio metallic microstructures is presented, Electroplated microstructures of different metals realized using these technologies are shown. In addition, various applications of this technology that have been realized are discussed. Second, the use of polyimide materials as integral parts of micromachined devices is presented. Emphasis is given to the development of a piezoresistive composite of polyimide/graphite for sensor applications