• DocumentCode
    2663100
  • Title

    MEMS Scanning Diffraction Grating Spectrometer

  • Author

    Kim, B. ; Sinibaldi, J. ; Karunasiri, G.

  • Author_Institution
    Naval Postgraduate Sch., Monterey, CA
  • fYear
    2006
  • fDate
    21-24 Aug. 2006
  • Firstpage
    46
  • Lastpage
    47
  • Abstract
    A new type of grating spectroscopy, using a micromachined scanning grating spectrometer is presented. We achieve resolution of 17-70 nm in the spectroscopy using a HeNe laser as a source
  • Keywords
    diffraction gratings; gas lasers; helium; infrared spectrometers; micro-optomechanical devices; micromachining; neon; visible spectrometers; He-Ne; HeNe laser source; MEMS; grating spectroscopy; micromachined scanning diffraction grating spectrometer; spectroscopy resolution; Adaptive optics; Detectors; Diffraction gratings; Electrodes; Gold; Light sources; Micromechanical devices; Optical arrays; Optical modulation; Spectroscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
  • Conference_Location
    Big Sky, MT
  • Print_ISBN
    0-7803-9562-X
  • Type

    conf

  • DOI
    10.1109/OMEMS.2006.1708257
  • Filename
    1708257
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2663100