• DocumentCode
    2663150
  • Title

    High Fill-Factor Arrays of Flexure Hinge Type Micromirrors for Multi Object Spectroscopy

  • Author

    Waldis, S. ; Clerc, P.-A. ; Noell, W. ; Zickar, M. ; de Rooij, N.F. ; Zamkotsian, F.

  • Author_Institution
    Inst. of Microtechnol., Neuchatel Univ.
  • fYear
    2006
  • fDate
    21-24 Aug. 2006
  • Firstpage
    48
  • Lastpage
    49
  • Abstract
    Micromirror arrays have been fabricated dedicated to astronomical instrumentation. The 100times200 mum2 sized micromirrors show an excellent optical surface quality and can be electrostatically tilted by 20deg. A system of multiple landing beams have been implemented, which forces uniform tilt angle
  • Keywords
    astronomical spectra; astronomical techniques; astronomical telescopes; infrared spectroscopy; micro-optomechanical devices; micromirrors; optical arrays; 100 micron; 200 micron; MEMS; astronomical instrumentation; electrostatic tilting; fill-factor; flexure-hinge type micromirror array; infrared spectrometers; micromirror array fabrication; multiobject spectroscopy; multiple landing beams; optical surface quality; telescopes; Cryogenics; Electrodes; Etching; Fasteners; Micromirrors; Mirrors; Optical recording; Silicon on insulator technology; Spectroscopy; Telescopes;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
  • Conference_Location
    Big Sky, MT
  • Print_ISBN
    0-7803-9562-X
  • Type

    conf

  • DOI
    10.1109/OMEMS.2006.1708258
  • Filename
    1708258
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2663150