A Miniature Michelson Interferometer using Vertical Bragg Mirrors on SOI

Author

Saadany, B. ; Bourouina, T. ; Malak, M. ; Kubota, M. ; Mita, Y. ; Khalil, D.

Author_Institution

ESIEE/Esycom-Lab, Noisy-le-Grand

fYear

2006

fDate

21-24 Aug. 2006

Firstpage

50

Lastpage

51

Abstract

A Michelson interferometer utilizing silicon Bragg reflectors is presented for the first time. The Bragg mirrors as well as the beam splitter are all realized at the same DRIE step, and occupy an area of 150 mumtimes150 mum. To the best of the authors´ knowledge this the smallest reported foot print of the interferometer. The fabricated interferometer and measured characteristics are presented

Keywords

Michelson interferometers; distributed Bragg reflectors; micro-optomechanical devices; optical beam splitters; silicon; silicon-on-insulator; 150 micron; SOI; Si-SiO₂; beam splitter; interferometer characteristics; interferometer fabrication; miniature Michelson interferometer; silicon Bragg reflectors; vertical Bragg mirrors; Foot; Mirrors; Optical interferometry; Optical reflection; Optical refraction; Optical sensors; Optical variables control; Phase shifting interferometry; Silicon; Wavelength measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on

Conference_Location

Big Sky, MT

Print_ISBN

0-7803-9562-X

Type

conf

DOI

10.1109/OMEMS.2006.1708259

Filename

1708259