• DocumentCode
    2663264
  • Title

    An In-Situ Measurement Technique for Through-Plane Thermal Properties of Thin Dielectric Films

  • Author

    Hodge, Thomas C. ; Bidstrup, S.A. ; Kohl, Paul A. ; Lee, J.B. ; Allen, Mark G.

  • Author_Institution
    Georgia Institute of Technology
  • fYear
    1994
  • fDate
    13-15 Apr 1994
  • Firstpage
    344
  • Lastpage
    349
  • Keywords
    Capacitors; Dielectric films; Dielectric measurements; Dielectric substrates; Dielectric thin films; Electrodes; Geometry; Measurement techniques; Permittivity; Polymer films;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Multichip Modules, 1994. Proceedings of the 1994 International Conference on
  • Print_ISBN
    0-930815-39-4
  • Type

    conf

  • DOI
    10.1109/ICMCM.1994.753573
  • Filename
    753573
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2663264