Title :
Micromirror integrated with piezorestive rotation angle sensor for measuring small signal
Author :
Tabata, Motoki ; Sasaki, Minoru ; Hane, Kazuhiro
Author_Institution :
Dept. of Nanomech. Eng., Tohoku Univ., Sendai
Abstract :
A piezoresistive rotation angle sensor is integrated in a micromirror device. The sensor detects the shear stress inside the torsion bar generated by the mirror rotation. The small sensor signal is successfully measured using the time-modulation method clearing the detailed performance of the sensor. The accuracy of 0.03 degrees is confirmed. The improved device design is illustrated
Keywords :
angular measurement; micromirrors; piezoresistive devices; shear strength; micromirror device; mirror rotation; piezoresistive rotation angle sensor; sensor signal measurement; shear gauge; shear stress detection; time-modulation method; torsion bar; Goniometers; Micromirrors; Optical beams; Optical sensors; Piezoresistance; Rotation measurement; Signal detection; Signal generators; Stress; Voltage;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708265
