Title :
Integrated FET-Polysilicon Micromachining Process for Optical MEMS
Author :
Cowan, W.D. ; Resnick, P.J. ; Okandan, M. ; Spahn, O.B. ; Dagel, D.J. ; Grossetette, G.D.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM
Abstract :
Co-fabricated transistors in the SUMMiTtrade process enable large scale micromirror arrays with practical pin-out. Novel drive circuitry and optical/electrical performance for initial micromirror arrays are described
Keywords :
field effect transistors; micro-optomechanical devices; micromachining; micromirrors; SUMMiTtrade process; co-fabricated transistors; drive circuitry; electrical performance; integrated FET-polysilicon micromachining process; micromirror arrays; optical MEMS; optical performance; Circuits; Electrodes; Etching; FETs; Integrated optics; Micromachining; Micromechanical devices; Micromirrors; Mirrors; Optical arrays;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708266
