Title :
A Photonic Crystal Waveguide Switch with a Movable Bridge Slab
Author :
Umemori, K. ; Kanamori, Y. ; Hane, K.
Author_Institution :
Dept. of Nanomech., Tohoku Univ., Sendai
Abstract :
A photonic crystal waveguide switch with a movable slab was fabricated by silicon micromachining. The switch structure consisted of an input, an output photonic crystal waveguide slabs, and a switching slab to bridge the waveguides. Driving the switching slab with a electrostatic micro-electro-mechanical actuator, the transmission between the waveguides was modulated. The switching characteristics were explained by the calculation results using the finite-difference time-domain method
Keywords :
electron beam lithography; electrostatic actuators; finite difference time-domain analysis; micro-optomechanical devices; micromachining; optical switches; optical waveguides; photonic crystals; silicon; electron beam lithography; electrostatic microelectro-mechanical actuator; finite-difference time-domain method; movable bridge slab; photonic crystal waveguide slabs; photonic crystal waveguide switch; silicon micromachining; switch structure; switching characteristics; waveguide transmission; Bridges; Electrostatics; Finite difference methods; Optical waveguides; Personal communication networks; Photonic crystals; Semiconductor waveguides; Silicon; Slabs; Switches;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708270
