• DocumentCode
    2663432
  • Title

    Design and Fabrication of Optical MEMS Modulators with Silicon Wire Waveguide

  • Author

    Higo, Akio ; Fujita, Hiroyuki ; Toshiyoshi, Hiroshi

  • Author_Institution
    Inst. of Ind. Sci., Tokyo Univ.
  • fYear
    2006
  • fDate
    21-24 Aug. 2006
  • Firstpage
    78
  • Lastpage
    79
  • Abstract
    This paper presents design presents design and theoretical analysis of a silicon optical waveguide modulator with an electrostatic micromechanical structure actuated in the evanescent range over a silicon wire waveguide
  • Keywords
    electrostatic actuators; elemental semiconductors; micro-optomechanical devices; optical design techniques; optical fabrication; optical modulation; optical waveguide components; silicon; Si; electrostatic micromechanical structure; evanescent field; optical MEMS modulator design; optical MEMS modulator fabrication; silicon wire optical waveguide modulator; Electrostatic analysis; Micromechanical devices; Optical design; Optical device fabrication; Optical modulation; Optical surface waves; Optical waveguide theory; Optical waveguides; Silicon; Wire;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
  • Conference_Location
    Big Sky, MT
  • Print_ISBN
    0-7803-9562-X
  • Type

    conf

  • DOI
    10.1109/OMEMS.2006.1708273
  • Filename
    1708273
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2663432