High Fill-Factor Paraboloidal Microlens Arrays

Author

Chang, Sung-Il ; Lee, Joo-Hyung ; Yoon, Jun-Bo

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Korea Adv. Inst. of Sci. & Technol.

fYear

2006

fDate

21-24 Aug. 2006

Firstpage

80

Lastpage

81

Abstract

In this paper, we proposed a new fabrication method for a high fill-factor microlens arrays (MLA) with controllable paraboloidal profiles, based upon the 3-D diffuser lithography and additional flood exposure method. The proposed fabrication method of the MLA consists of three steps; formation of a high fill-factor photoresist mold using the 3-D diffuser lithography and MESD technology, fabrication of a copper intermediate mold and nickel master mold by electroplating, and plastic replication from the nickel master mold

Keywords

electroplating; integrated optics; microlenses; optical arrays; optical fabrication; optical polymers; photoresists; replica techniques; ultraviolet lithography; 3-D diffuser lithography; MESD technology; UV light; copper intermediate mold; electroplating; fabrication method; flood exposure method; high fill-factor paraboloidal microlens arrays; nickel master mold; paraboloidal profiles; photoresist mold; plastic replication; Copper; Fabrication; Lenses; Lithography; Microoptics; Nickel; Optical arrays; Plastics; Polymers; Resists;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on

Conference_Location

Big Sky, MT

Print_ISBN

0-7803-9562-X

Type

conf

DOI

10.1109/OMEMS.2006.1708274

Filename

1708274