Title :
Characteristics of Buckled Bridges and Lifted Micromirror using Film Stress
Author :
Sasaki, M. ; Hane, K. ; Briand, D. ; Noell, W. ; de Rooij, N.
Author_Institution :
Dept. of Nanomech., Tohoku Univ., Sendai
Abstract :
In this paper, we have reported the use of buckled bridges for realizing the vertical comb drive actuators. The detailed characteristics of the buckled bridges and the lifted micromirror using film stress are also examined
Keywords :
micro-optomechanical devices; microactuators; micromirrors; optical films; buckled bridges; film stress; lifted micromirror; vertical comb drive actuators; Actuators; Bars; Bridges; Etching; Length measurement; Micromirrors; Mirrors; Shape; Substrates; Thermal stresses;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708275
