• DocumentCode
    2663463
  • Title

    Characteristics of Buckled Bridges and Lifted Micromirror using Film Stress

  • Author

    Sasaki, M. ; Hane, K. ; Briand, D. ; Noell, W. ; de Rooij, N.

  • Author_Institution
    Dept. of Nanomech., Tohoku Univ., Sendai
  • fYear
    2006
  • fDate
    21-24 Aug. 2006
  • Firstpage
    82
  • Lastpage
    83
  • Abstract
    In this paper, we have reported the use of buckled bridges for realizing the vertical comb drive actuators. The detailed characteristics of the buckled bridges and the lifted micromirror using film stress are also examined
  • Keywords
    micro-optomechanical devices; microactuators; micromirrors; optical films; buckled bridges; film stress; lifted micromirror; vertical comb drive actuators; Actuators; Bars; Bridges; Etching; Length measurement; Micromirrors; Mirrors; Shape; Substrates; Thermal stresses;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
  • Conference_Location
    Big Sky, MT
  • Print_ISBN
    0-7803-9562-X
  • Type

    conf

  • DOI
    10.1109/OMEMS.2006.1708275
  • Filename
    1708275
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2663463