Electrostatically-tuned Optical Filter Based on Silicon Bragg Reflectors

Author

Saadany, B. ; Malak, M. ; Marty, F. ; Mita, Y. ; Khalil, D. ; Bourouina, T.

Author_Institution

ESIEE/Esycom-Lab, Noisy-le-Grand

fYear

2006

fDate

21-24 Aug. 2006

Firstpage

86

Lastpage

87

Abstract

A tunable Fabry-Perot cavity composed of two Bragg mirrors is realized using enhanced deep reactive ion etching (DRIE) process. Filter tuning is achieved by moving one of the mirrors using a high resolution electrostatic actuator over SOI. Measured filter response in C&L bands is presented

Keywords

Fabry-Perot resonators; distributed Bragg reflectors; electrostatic actuators; elemental semiconductors; micro-optomechanical devices; optical fabrication; optical filters; optical testing; optical tuning; silicon; silicon-on-insulator; sputter etching; Bragg mirrors; Fabry-Perot cavity resonator; SOI; Si; Si-SiO₂; deep reactive ion etching process; filter response measurement; high-resolution electrostatic actuator; optical filter tuning; silicon Bragg reflectors; Electrostatic actuators; Electrostatic measurements; Etching; Mirrors; Optical filters; Optical resonators; Refractive index; Resonator filters; Silicon; Springs;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on

Conference_Location

Big Sky, MT

Print_ISBN

0-7803-9562-X

Type

conf

DOI

10.1109/OMEMS.2006.1708277

Filename

1708277