An All Silicon Micro-Machined Add-Drop Optical Filter

Author

Saadany, B. ; Khalil, D. ; Malak, M. ; Kubota, M. ; Marty, F. ; Mita, Y. ; Bourouina, T.

Author_Institution

ESIEE/Esycom-Lab, Noisy-le-Grand

fYear

2006

fDate

21-24 Aug. 2006

Firstpage

94

Lastpage

95

Abstract

In this paper, all silicon optical add-drop filter is presented, where a tilted 45deg Bragg mirror acts as a wavelength selective reflector. The 45deg configuration allows the add and drop of the desired wavelengths simultaneously. The Bragg mirrors are realized by deep-reactive-ion-etching (DRIE) of the silicon substrate thus producing successive vertical Si/air interfaces. The fabricated devices, as well as the measured characteristics are presented

Keywords

distributed Bragg reflectors; elemental semiconductors; micro-optomechanical devices; micromachining; optical communication equipment; optical fabrication; optical filters; optical testing; silicon; sputter etching; wavelength division multiplexing; Bragg mirror; Si; WDM; add-drop filter response measurement; deep-reactive-ion-etching; silicon micro-machined add-drop optical filter; vertical Si-air interfaces; wavelength selective reflector; Costs; Mirrors; Optical fiber devices; Optical fiber filters; Optical fiber subscriber loops; Optical filters; Resonance; Silicon; Wavelength division multiplexing; Wavelength measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on

Conference_Location

Big Sky, MT

Print_ISBN

0-7803-9562-X

Type

conf

DOI

10.1109/OMEMS.2006.1708281

Filename

1708281