DocumentCode
2663653
Title
Digital Optical 1xN MEMS Switch Utilizing Microassembled Rotating Micromirror
Author
Basha, M.A. ; Dechev, N. ; Safavi-Naeini, S. ; Chaudhuri, S.
Author_Institution
Dept. of Electr. & Comput. Eng., Waterloo Univ., Ont.
fYear
2006
fDate
21-24 Aug. 2006
Firstpage
102
Lastpage
103
Abstract
We present a new novel design for a 1timesN digital optical space MEMS switch with a large number of output ports. The switch employs a single rotating micromirror. The rotating micromirror consists of a novel electro-static rotary motor, onto which a 3D mirror structure is assembled using a robotic-based microassembly process. The rotating mirror in the switch can digitally rotate with 480 steps per full revolution in 14.4 msec. A 1.04 dB uniform coupling loss across all output ports is achieved
Keywords
micro-optomechanical devices; microassembling; micromirrors; optical losses; optical switches; 14.4 msec; 3D mirror; coupling loss; digital optical space MEMS switch; electro-static rotary motor; microassembled rotating micromirror; robotic-based microassembly process; Couplings; Microassembly; Micromirrors; Micromotors; Microswitches; Mirrors; Optical design; Optical switches; Orbital robotics; Robotic assembly;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location
Big Sky, MT
Print_ISBN
0-7803-9562-X
Type
conf
DOI
10.1109/OMEMS.2006.1708285
Filename
1708285
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